Kionix™ TechnologyWhat is Kionix™ Technology? Kionix™ Technology is defined by the proprietary plasma micromachining process and the technology to hermetically seal at a wafer level by bonding the silicon lid wafer to the device wafer. The sense element that detects acceleration consists of a fixed electrode, a movable electrode, and a spring. These structures are formed on the silicon device wafer using ROHM’s pro
